JPH0312348U - - Google Patents
Info
- Publication number
- JPH0312348U JPH0312348U JP7222989U JP7222989U JPH0312348U JP H0312348 U JPH0312348 U JP H0312348U JP 7222989 U JP7222989 U JP 7222989U JP 7222989 U JP7222989 U JP 7222989U JP H0312348 U JPH0312348 U JP H0312348U
- Authority
- JP
- Japan
- Prior art keywords
- electron irradiation
- ion beam
- intermittent
- scan type
- mechanical scan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7222989U JPH0312348U (en]) | 1989-06-20 | 1989-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7222989U JPH0312348U (en]) | 1989-06-20 | 1989-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312348U true JPH0312348U (en]) | 1991-02-07 |
Family
ID=31609984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7222989U Pending JPH0312348U (en]) | 1989-06-20 | 1989-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312348U (en]) |
-
1989
- 1989-06-20 JP JP7222989U patent/JPH0312348U/ja active Pending
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